Charged particle beam device and a method of improving image quality of the same

摘要

The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate allocation ratio in accordance with pattern arrangement. In a charged particle beam device capable of improving image quality by using detected images obtained from a plurality of detectors and in a method of improving the image quality, a method of generating one or more output images from detected images corresponding to respective outputs of the detectors that are arranged at different locations is controlled by using information of a pattern direction, an edge strength, or others calculated from a design data or the detected image. In this manner, a detection area of the detected signals can be expanded by using the plurality of detectors, and the image quality such as the contrast can be improved by synthesizing the detected signals by using the pattern direction or the edge strength calculated from the design data or the detected images.

主权项

1. A method of improving image quality of a charged particle beam device, the method comprising:
a charged particle beam irradiating step of irradiating and scanning charged particle beam converged over a sample that is an object to be image-captured; a detected image generating step of detecting secondary charged particles or reflection charged particles generated from the sample by the charged particle beam by using two or more detectors that are arranged at different locations and of generating detected images corresponding to respective outputs of the detectors; and a detected image synthesizing step by a method of synthesizing the number of output images less than the number of the detectors based on pattern information by using the detected image or a method of synthesizing the number of output images less than the number of the detectors by calculating a synthesis control parameter, wherein the detected image synthesizing step calculates a direction-dependent blocking state of scattered electrons based on pattern information, and determines a synthesis ratio based on the blocking state.