X-ray microscope system with cryogenic handling system and method

摘要

A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography.

主权项

1. A cryogenic x-ray imaging method, comprising:
generating an x-ray beam that irradiates specimens; detecting the x-ray beam from the specimens; holding the specimens on a cryogenic base in the x-ray beam in a vacuum chamber; positioning the specimens in the beam by rotating the cryogenic base using a positioning stage that is located entirely within the vacuum chamber; cooling the cryogenic base via a flexible thermal linkage between the cryogenic base and a refrigeration source; and positioning a region of interest of the specimen on the cryogenic base in the beam by moving the cryogenic base along two or more axes using the positioning stage.