| 摘要 |
<p>A probe station is disclosed. The probe station comprises: a chuck to support a substrate; a probe card arranged on the upper part of the chuck to electrically check semiconductor devices formed on the substrate; an electrostatic control unit which is connected to the chuck, and which is to apply control voltage to the chuck based on the electrostatic voltage measured in order to manage electrostatic voltage of the chuck within the range already set.</p> |
