RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND AND POLYMERIC COMPOUND

摘要

A resist composition including a polymeric compound containing a structural unit derived from a compound represented by general formula (a0-m), and a method of forming a resist pattern using the resist composition. R1 represents a polymerizable group; Y1 represents a hydrocarbon group of 1 to 30 carbon atoms; L1 represents a single bond or a carbonyl group; Y2 represents a divalent linking group, and R2 represents a hydrogen atom or a hydrocarbon group, provided that Y2 and R2 may be mutually bonded to form a ring with the nitrogen atom having Y2 and R2 bonded thereto; R3 represents a hydrogen atom or a hydrocarbon group; Y3 represents a group which forms an aromatic ring together with the two carbon atoms having Y3 bonded thereto, provided that the aromatic ring may have a nitro group or a substituent other than the nitro group bonded to the aromatic ring.;

主权项

1. A resist composition comprising a base component (A) which generates base upon exposure and exhibits changed solubility in a developing solution under action of acid, wherein
the base component (A) comprises a polymeric compound (A1) comprising a structural unit derived from a compound represented by general formula (a0-m) shown below: wherein R1 represents a polymerizable group; Y1 represents a hydrocarbon group of 1 to 30 carbon atoms which may have a substituent; L1 represents a single bond or a carbonyl group; Y2 represents a divalent linking group, and R2 represents a hydrocarbon group which may have a substituent, provided that Y2 and R2 are mutually bonded to form a ring with the nitrogen atom having Y2 and R2 bonded thereto; R3 represents a hydrogen atom or a hydrocarbon group which may have a substituent; Y3 represents a group which forms an aromatic ring together with the two carbon atoms having Y3 bonded thereto, provided that the aromatic ring may have a nitro group or a substituent other than the nitro group bonded to the aromatic ring.