| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter, a colorimetry sensor including the wavelength variable interference filter, and a colorimetry module, improving connecting reliability in a simple wiring structure. <P>SOLUTION: An etalon 5 includes: a first substrate 51; a second substrate 52 joined to the first substrate 51; a pair of mirrors 56, 57 provided opposite to each other between the substrates; an electrostatic actuator 54 having a first electrode 541 provided on the first substrate 51 and a second electrode 542 provided on the second substrate 52; a first electrode pad 541B provided on the outer peripheral part of the first substrate 51 and connected to the first electrode 541; and a second electrode pad 543 provided on the outer peripheral part of the first substrate 51 and insulated from the first electrode 541. The first substrate 51 and the second substrate 52 are bonded to each other by conductive bonding parts 546, 547, and the second electrode 542 and the second electrode pad 543 are caused to conduct through the bonding parts 546, 547. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
