发明名称 プローブ先端を接点面の配列に接触させる方法及び装置
摘要 <p>The invention generally relates to a method and device for contacting contact areas (22) with probe tips (18) in a tester. The contact areas (22), which are arranged on a substrate (6), and the probe tips (18) are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (18), the contacting between the probe tips (18) and the contact areas (22) is observed from at least two observation directions (34), which include an observation angleαin a range of 0 to 180°.</p>
申请公布号 JP5706515(B2) 申请公布日期 2015.04.22
申请号 JP20130504129 申请日期 2010.04.13
申请人 发明人
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
代理机构 代理人
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