<p>The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.</p>
申请公布号
EP2700083(B1)
申请公布日期
2015.04.22
申请号
EP20120720091
申请日期
2012.04.04
申请人
OERLIKON SURFACE SOLUTIONS AG, TRÜBBACH
发明人
KRASSNITZER, SIEGFRIED;LENDI, DANIEL;LECHTHALER, MARKUS;RUHM, KURT