发明名称 可動物体の位置を制御する方法、位置決め装置を制御する制御システム、およびリソグラフィ装置
摘要 A control system controls a positioning device displaceable in at least one degree of freedom by a reluctance motor. A force sensing element and a controller adjust force applied by the motor responsive to a force sensing element configured to sense force applied by the motor. The controller receives a signal representing force applied by the motor from the force sensing element, obtain an acceleration trajectory plan associated with a velocity trajectory plan for the positioning device, obtain a force trajectory plan associated with the acceleration trajectory plan, compare the force applied with a required amount of force obtained from the force trajectory, and adjust the amount of force applied by the motor based on the comparison. Related methods are also presented.
申请公布号 JP5705466(B2) 申请公布日期 2015.04.22
申请号 JP20100142152 申请日期 2010.06.23
申请人 エーエスエムエル ホールディング エヌ.ブイ. 发明人 ルー,ステファン;カーター,フレデリック マイケル;マッケンジー,ロス,イアン
分类号 H01L21/027;G03F7/20;H02P5/00;H02P25/08 主分类号 H01L21/027
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