| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus having a dust treatment function to prevent a fire caused by dusts made by application of a laser beam. <P>SOLUTION: The apparatus includes: a chuck table for holding a workpiece; a laser beam irradiation means provided with a condenser that applies a laser beam to the workpiece held on the chuck table; and a cleaning means for cleaning the workpiece. Further, the laser beam machining apparatus has a dust exhausting means including: a dust suction member opened to an application unit of the laser beam applied from the condenser of the means for laser beam irradiation; a first duct one end of which is connected to the dust suction member, and the other end of which is connected to the means for cleaning; a second duct one end of which is connected to the means for cleaning; and an air exhausting means which is connected to the other end of the second duct. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
