| 发明名称 | Solid state imaging device having a pair of charge holding films | ||
| 摘要 | A solid-state imaging device according to embodiments of the present disclosure includes a light receiving unit, a first charge holding film, and a second charge holding film. The light receiving unit converts the incident light to an electric current. The first charge holding film is formed above the light receiving unit and holds electric charges. The second charge holding film is formed on the first charge holding film and holds electric charges. Further, concentration of oxygen in the second charge holding film is higher than concentration of oxygen in the first charge holding film. | ||
| 申请公布号 | US9012925(B2) | 申请公布日期 | 2015.04.21 |
| 申请号 | US201313787746 | 申请日期 | 2013.03.06 |
| 申请人 | Kabushiki Kaisha Toshiba | 发明人 | Kamimura Masaki;Uya Shinji;Kudo Tomoyasu |
| 分类号 | H01L27/15;H01L21/00;H01L31/02;H01L31/18;H01L31/0216;H01L27/146 | 主分类号 | H01L27/15 |
| 代理机构 | Patterson & Sheridan, LLP | 代理人 | Patterson & Sheridan, LLP |
| 主权项 | 1. A solid-state imaging device, comprising: a light receiving unit for converting an incident light to an electric current; a first charge holding film holding electric charges, formed above the light receiving unit; and a second charge holding film holding electric charges, formed on the first charge holding film, wherein concentration of oxygen in the second charge holding film is higher than concentration of oxygen in the first charge holding film. | ||
| 地址 | Tokyo JP | ||