| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus having a photoluminescence measuring function by a laser beam for processing.SOLUTION: The laser processing apparatus includes: laser beam irradiation means 5 having laser beam oscillating means 51 for processing a workpiece W held on a chuck table 36, laser beam output adjustment means 52, and a light collector 53 for collecting and radiating laser beams; processing feeding means for relatively moving the chuck table and the laser beam irradiation means in a processing feeding direction; indexing feeding means for relatively moving the chuck table and the laser beam irradiation means in an indexing feeding direction orthogonal to the processing feeding direction; means for detecting a position, in an X axis direction, of the chuck table moved by the processing feeding means; means for detecting a position, in a Y axis direction, of the chuck table moved by the indexing feeding means; and control means 8. The laser processing apparatus further includes: a photodetector 71 for detecting a spectrum generated from the workpiece, by the laser beam from the light collector 53; a spectrometer 72; and wavelength spectral distribution display means 73. |
