用以判断一样本材料层参数的热成像方法及系统;LIT METHOD AND SYSTEM FOR DETERMINING MATERIAL LAYER PARAMETERS OF A SAMPLE

摘要

一种使用锁相热成像(LIT)技术判断样本层的材料参数之方法和系统，其中一电路的至少一个热源埋藏在该样本层中。该方法包括将一非谐波测试信号施加于该样本层之电路，并且使用红外感测器将该样本层成像，以在该非谐波测试信号施加于该电路的同时，获得该样本层之IR图像；检测一从该样本层之成像中获得的热响应信号，该热响应信号与该样本层中的热学热传播相关；使该热响应信号受快速傅利叶变换(FFT)处理，以便将该响应信号分解到一频谱，该频谱包含属一基谐波正弦或余弦信号的至少第一和第二谐波信号，作为在多个特定频率下之频率特定响应信号；判断在在一热源位置处的多个特定频率下的频率特定响应信号之相位移；以及从与该样本层的材料参数相关的该等频率特定响应信号所判断的相位移中，获得一频率对相位移之关系曲线。; detecting a thermal response signal obtained from the imaging being in correlation to thermal heat propagation within the sample layer; subjecting the response signal to a fast Fourier transformation (FFT) to break down the response signal into a frequency spectrum containing at least first and second harmonics signals of a base harmonic sine or cosine signal as frequency specific response signals at multiple specific frequencies; determining the phase shifts of the frequency specific response signals at the multiple specific frequencies at a heat source position; and obtaining a frequency vs. phase shift curve from the determined phase shifts of the frequency specific response signals related to the material parameters of the sample layer.