MEMS MICROPHONE WITH MEMBRANE ANTENNAS

摘要

A MEMS microphone. The microphone includes a backplate, a membrane, and a plurality of antennas. The backplate has a plurality of acoustic apertures. The membrane is parallel to the backplate and is positioned a distance from the backplate. The plurality of antennas are connected to the membrane and extend toward the backplate. In addition, the plurality of antennas are positioned entirely within spaces defined by the plurality of acoustic apertures.

主权项

1. A MEMS microphone, the microphone comprising:
a backplate having a plurality of acoustic apertures; a membrane parallel to the backplate and positioned a distance from the backplate; and a plurality of antennas connected to the membrane and extending toward the backplate; wherein the plurality of antennas are positioned entirely within spaces defined by the plurality of acoustic apertures.