| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface condition evaluation device and a surface condition evaluation method that can evaluate a surface condition of a fine area of a sample in a wide range.SOLUTION: According to an embodiment, a surface condition evaluation device including an imaging part and a processing part is provided. The imaging part images a first area and a second area of a sample having a surface including the first area where a plurality of droplets are provided and the second area where a plurality of droplets are provided. The processing part evaluates a condition of the surface according to comparison results of a first image of the first area and a second image of the second area imaged by the imaging part. |
