VACUUM EVAPORATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a vacuum evaporation system which can increase a total dispersion amount of a vapor deposition material from an evaporation source and improve film thickness uniformity to achieve a faster vapor deposition process.SOLUTION: A vacuum evaporation system includes a plurality of crucibles 20a, 20b which deposit a film of a vapor deposition material in opposition to a base plate arranged in a direction orthogonal to the longitudinal direction, and a heater 21-5 provided on outside-located one of longitudinal side faces of outermost crucibles 20a of the crucibles 20a, 20b.