发明名称 |
METHOD FOR COATING A SUBSTRATE AND COATER |
摘要 |
<p>A method for coating a substrate by means of a cathode arrangement including at least two rotatable cathodes is disclosed. The method includes rotating at least one of the at least two rotatable cathodes in a first direction, and, at the same time, rotating at least one of the at least two rotatable cathodes in a second direction. The first direction is opposite to the second direction. Furthermore, a controller for controlling a coating process is disclosed. Furthermore, a coater for coating a substrate is disclosed. The coater includes a cathode arrangement with at least two rotatable cathodes and a controller as disclosed herein.</p> |
申请公布号 |
EP2855729(A1) |
申请公布日期 |
2015.04.08 |
申请号 |
EP20120724615 |
申请日期 |
2012.05.29 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SCHEER, EVELYN;HANIKA, MARKUS;SCHWANITZ, KONRAD;PIERALISI, FABIO;KLÖPPEL, ANDREAS;LIU, JIAN;LOPP, ANDREAS |
分类号 |
C23C14/35;H01J37/34 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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