| 摘要 |
<p>A method for producing a metal oxide thin film wherein the metal oxide thin film is obtained by a thin film production process using a metal organic compound. By this method, a phosphor thin film such as a Y2O3:Eu or CaTiO3:Pr film is directly formed on an organic material substrate or a glass substrate efficiently by heating, ultraviolet light irradiation or plasma irradiation using a solution of metal oxide nanoparticles or a metal organic compound solution containing metal oxide nanoparticles. Specifically disclosed is a method for producing a metal oxide thin film by chemical solution deposition, which is characterized in that a metal-containing metal oxide thin film is formed as follows: a solution of metal oxide nanoparticles is applied over a supporting body in advance and then firing or laser irradiation is carried out, thereby forming a metal oxide thin film; and then a metal-containing precursor solution is applied over the metal oxide thin film and then at least one or more processes among (1) a heating process, (2) a plasma irradiation process and (3) an ultraviolet light irradiation process are carried out at the same time, thereby forming a metal-containing metal oxide thin film by removing the substances other than the metal and metal oxide.</p> |
