| 摘要 |
An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway. |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LAURENT, THIBAULT;BLOKS, RUUD;CORTIE, ROGIER;HOUBEN, MARTIJN;JACOBS, JOHANNES;LAFARRE, RAYMOND;LEMPENS, HAN;OVERKAMP, JIM;PIETERSE, GERBEN;POLET, THEODORUS;SIMONS, WILHELMUS;STEFFENS, KOEN;TROMP, SIEGFRIED;VY, VAN VUONG |
