Formation of non-magnetic grooves

摘要

A method is disclosed for defining discrete magnetic and non-magnetic regions on the magnetic film layer of a storage media substrate. The method applies anodic oxidation of a cobalt-containing magnetic film layer to remove cobalt, followed by controlled deposition of a non-magnetic matrix into the regions where the cobalt has been removed. Deposition may either be electrodeposition, collimated vacuum deposition, or other methods depending upon the composition of the non-magnetic matrix being deposited. The method may be performed in a single electrochemical cell.

主权项

1. A method comprising: selectively removing cobalt from one or more of portions of a cobalt-containing magnetic film layer on a surface of a substrate using a first electrolyte solution, the substrate comprising a resist layer over the cobalt-containing magnetic film, the resist layer comprising one or more pattern features exposing one or more of the portions of the cobalt-containing magnetic film, wherein the removal of cobalt forms a groove in the cobalt-containing magnetic film layer; depositing a non-magnetic matrix in the groove using second electrolyte solution comprising a substantially similar electrolytic composition as the first electrolyte solution used for the selective removal of cobalt; controlling the rate of deposition of the non-magnetic matrix through application of an amount of current sufficient to adjust an electric potential of the second electrolyte solution; and controlling the rate of selective removal of cobalt through application of an amount of current sufficient to adjust an electric potential of the first electrolyte solution.