| 发明名称 |
COLD CATHODE IONIZATION VACUUM GAUGE |
| 摘要 |
A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode. |
| 申请公布号 |
US2015091579(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201414500820 |
申请日期 |
2014.09.29 |
| 申请人 |
MKS Instruments, Inc, |
发明人 |
Brucker Gerardo A.;Swinney Timothy C.;Kelly Brandon J. |
| 分类号 |
G01L21/34;H01J9/50;G01L19/06 |
主分类号 |
G01L21/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cold cathode ionization vacuum gauge comprising:
an extended anode electrode; a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode; an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current; and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode. |
| 地址 |
Andover MA US |
