发明名称 PROCESS WASTE GAS TREATMENT SCRUBBER
摘要 PROBLEM TO BE SOLVED: To provide a process waste gas treatment scrubber capable of treating water-soluble gas using an amine-based substance.SOLUTION: A process waste gas treatment scrubber includes a reaction unit contacting process waste gas and an amine-based substance with a process waste gas treatment flow path to remove water-soluble gas containing a hydrogen halide compound contained in the process waste gas by an acid-base reaction, and includes: a heat source unit installed upstream of the reaction unit for heating the process waste gas by a set heat source; and a cooling unit decomposing and cooling the process waste gas to collect reaction by-products, the heat source unit including: a plasma torch generating plasmas; an injection chamber contacting the inlet process waste gas with the plasmas; and a reaction chamber where the plasmas contact and react with the process waste gas to decompose the process waste gas.
申请公布号 JP2015061725(A) 申请公布日期 2015.04.02
申请号 JP20140192927 申请日期 2014.09.22
申请人 GNBS ENGINEERING CO LTD 发明人 PARK SANG SOON;JEONG JONG MOON
分类号 B01D53/68;B01D53/34;B01D53/86;B01D53/94;B01J27/24;H01L21/205 主分类号 B01D53/68
代理机构 代理人
主权项
地址