发明名称 |
PROCESS WASTE GAS TREATMENT SCRUBBER |
摘要 |
PROBLEM TO BE SOLVED: To provide a process waste gas treatment scrubber capable of treating water-soluble gas using an amine-based substance.SOLUTION: A process waste gas treatment scrubber includes a reaction unit contacting process waste gas and an amine-based substance with a process waste gas treatment flow path to remove water-soluble gas containing a hydrogen halide compound contained in the process waste gas by an acid-base reaction, and includes: a heat source unit installed upstream of the reaction unit for heating the process waste gas by a set heat source; and a cooling unit decomposing and cooling the process waste gas to collect reaction by-products, the heat source unit including: a plasma torch generating plasmas; an injection chamber contacting the inlet process waste gas with the plasmas; and a reaction chamber where the plasmas contact and react with the process waste gas to decompose the process waste gas. |
申请公布号 |
JP2015061725(A) |
申请公布日期 |
2015.04.02 |
申请号 |
JP20140192927 |
申请日期 |
2014.09.22 |
申请人 |
GNBS ENGINEERING CO LTD |
发明人 |
PARK SANG SOON;JEONG JONG MOON |
分类号 |
B01D53/68;B01D53/34;B01D53/86;B01D53/94;B01J27/24;H01L21/205 |
主分类号 |
B01D53/68 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|