| 摘要 |
<p>PURPOSE: A substrate heat-treating apparatus is provided to efficiently perform a heat-treatment process with respect to a substrate by heating the center part of the substrate using a heat absorbing unit. CONSTITUTION: A heat-treating furnace(2) is located in a case(1) and performs a heat-treatment process with respect to a glass substrate(W). A boat(7) transfers the glass substrate into a process tube(4). A heat barrier(13) insulates radiant heat from a heater(5). A heat absorbing unit(14) located between the center part of the glass substrate on the boat and the heat barrier. The heat absorbing unit absorbs the radiant heat. A holding unit(15) detachably holds the heat absorbing unit.</p> |
