发明名称 Substrate for superconducting compound and method for manufacturing the substrate
摘要 Provided are a substrate for a superconducting compound and a method for manufacturing the substrate which can realize the excellent adhesive strength simultaneously with high orientation of copper. An absorbed material on a surface of a copper foil to which rolling is applied at a draft of 90% or more is removed by applying sputter etching to the surface of the copper foil, sputter etching is applied to a nonmagnetic metal sheet, the copper foil and the metal sheet are bonded to each other by applying a pressure to the copper foil and the metal sheet using reduction rolls, crystals of the copper in the copper foil are oriented by heating a laminated body formed by such bonding, copper is diffused into the metal sheet by heating with a copper diffusion distance of 10 nm or more, and a protective layer is laminated to a surface of the copper foil of the laminated body.
申请公布号 US8993064(B2) 申请公布日期 2015.03.31
申请号 US201013510406 申请日期 2010.11.12
申请人 Toyo Kohan Co., Ltd.;Sumitomo Electric Industries, Ltd. 发明人 Okayama Hironao;Nanbu Kouji;Kaneko Akira;Ota Hajime;Ohki Kotaro;Yamaguchi Takashi;Hayashi Kazuhiko;Ohmatsu Kazuya
分类号 C22F1/08;C23C10/02;H01L39/24;H01L39/02;B32B15/20;C22C9/00;C22C19/03 主分类号 C22F1/08
代理机构 Browdy and Neimark, P.L.L.C. 代理人 Browdy and Neimark, P.L.L.C.
主权项 1. A method for manufacturing a substrate for a superconducting compound, the method comprising the steps of: removing an absorbed material on a surface of a cold-rolled copper foil by applying sputter etching to the surface of the cold-rolled copper foil, the cold-rolled copper foil having an absorbed material on the surface thereof and having been cold-rolled at a draft of 90% or more; applying sputter etching to a surface of a nonmagnetic metal sheet; applying together the surfaces which have been sputter etched of the cold-rolled copper foil and the nonmagnetic metal sheet, and forming a laminated body having a copper layer on the metal sheet by bonding the copper foil which has been cold-rolled at a draft of 90% or more and the metal sheet to each other by applying pressure to the copper foil and the metal sheet using reduction rolls; heating the laminated body and diffusing copper in the copper layer into the metal sheet while simultaneously providing a degree 4 of biaxial crystal orientation of the copper layer of 6° or less by heating with a copper diffusion distance of 10 nm or more so that the adhesion strength between the copper layer and the metal sheet is enhanced to 3 N/cm or more in terms of 180° peel strength; and laminating a protective layer having biaxial crystal orientation which indicates values of 6° or less in the degree of Δφ to a surface of the copper layer of the laminated body.
地址 Tokyo JP