Methods and apparatus for sealing a slit valve door

摘要

Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a gap between the slit valve door and an insert leading to a process chamber.

主权项

1. A method for sealing a unitary slit valve door having a groove formed therein, comprising:
providing a seal of flexible seal material disposed within the groove between a surface surrounding an opening to a process chamber and a surface of the slit valve door; disposing a hard stop alongside at least a portion of the seal between the seal and the groove and on an outside edge of the slit valve door, the hard stop formed integrally with the seal, wherein the hard stop and the outside edge of the slit valve door are aligned, and wherein the hard stop is protected from exposure to process gas; and compressing the seal between the surface of the slit valve door and the surface adjacent to the opening whereby deformation of the seal is limited by the hard stop.