METHOD FOR SEPARATION BETWEEN ACTIVE ZONE OF SUBSTRATE AND SUBSTRATE BACK FACE OR PORTION OF SUBSTRATE BACK FACE

摘要

PROBLEM TO BE SOLVED: To provide methods for separation and isolation of an active zone on a substrate front face from a substrate back face as a support layer.SOLUTION: Trenches and cavities 51 wider than the trenches are formed to extend the trenches. The cavities obtained by extending the trenches are adjacent to other cavities 31. When the cavities are filled with a given filling material 36, they form a separation zone between the active zone and a given portion 10b of a substrate 1 that will be separated later.