发明名称 |
SUBSTRATE CARRIER WITH INTEGRATED ELECTROSTATIC CHUCK |
摘要 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carrier. The support base has a heating/cooling reservoir formed therein. The electrode assembly and the support base form an unitary body configured for transport within a processing system. A quick disconnect is coupled to the body and configured to trap a heat regulating medium in the reservoir heating/cooling reservoir when the body is decoupled from a source of heat regulating medium. |
申请公布号 |
WO2015042304(A1) |
申请公布日期 |
2015.03.26 |
申请号 |
WO2014US56380 |
申请日期 |
2014.09.18 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WHITE, JOHN M.;WANG, ZUOQIAN |
分类号 |
C23C16/00;B65G49/05;C23C14/00 |
主分类号 |
C23C16/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|