发明名称 Method for depositing thin film and method for fabricating organic light emitting display device using the same
摘要 A method for depositing a thin film according to an embodiment of the present invention includes a step of forming shadow masks on a substrate, a step of bending the substrate to form a surface having a preset curvature and fixing it, a step of arranging a deposition source in a position which has an equal angle with regard to the center part and peripheral part of the substrate, and a step of depositing a thin film on the substrate having the shadow mask from the deposition source.
申请公布号 KR20150031819(A) 申请公布日期 2015.03.25
申请号 KR20130111497 申请日期 2013.09.17
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 LEONID KAPLAN;VALERIY PRUSHINSKIY;LEE, WON BAEK;PARK, JI RYEON;PARK, HOI SANG
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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