发明名称 |
METHOD FOR PRODUCING A POLYCRYSTALLINE CERAMIC FILM |
摘要 |
<p>The invention relates to a method for producing a polycrystalline ceramic film on a surface (12) of a substrate (10), in which a particle stream is directed onto the surface (12) and the ceramic film is formed by deposition of the particles onto the surface (12), wherein the particle stream is directed by means of a diaphragm onto the surface (12) along a preferred direction until a first specified layer thickness is reached, the preferred direction and a surface normal of the surface (12) enclosing a specified angle of incidence. According to the invention, the diaphragm is removed from the particle stream after the specified layer thickness has been reached, and additional particles are directed onto the surface (12) until a specified second layer thickness has been reached.</p> |
申请公布号 |
EP2850219(A1) |
申请公布日期 |
2015.03.25 |
申请号 |
EP20130729717 |
申请日期 |
2013.06.18 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SCHREITER, MATTHIAS;WERSING, WOLFRAM |
分类号 |
C23C14/00;C23C14/04;C23C14/06;C23C14/08;C23C14/22;H01L41/316;H03H3/02 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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