Method for fabricating a magnetic writer having half-side shields

摘要

A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. An intermediate is provided. The intermediate layer includes a first sublayer and a second sublayer in at least a side shield region. The first sublayer has a first sublayer top. The second sublayer is on the first sublayer top in the shield region. A trench is formed in the intermediate layer using at least one etch. A main pole is provided in the trench. The main pole has a bottom and a top wider than the bottom. The first sublayer top is between the top and the bottom of the main pole. At least a portion of the second sublayer is removed in the shield region. At least one half side shield is provided. A bottom of the at least one half side shield being between the top and the bottom of the main pole.

主权项

1. A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:
providing an intermediate including a first sublayer and a second sublayer in at least a side shield region, the first sublayer having a first sublayer top, the second sublayer residing on the first sublayer top in the shield region; forming a trench in the intermediate layer using at least one etch; providing a main pole in the trench, the main pole having a bottom and a top wider than the bottom, the first sublayer top being between the top and the bottom of the main pole; removing at least a portion of the second sublayer in the shield region; and providing at least one half side shield, a bottom of the at least one half side shield being between the top and the bottom of the main pole.