| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a charged particle accelerator to which a positive ion source is applicable and which enables tandem electrostatic acceleration of an ion beam without using a charge converter.SOLUTION: A charged particle accelerator includes: an ion source 10 that emits a positive ion beam and has a ground potential; a pair of acceleration tubes 11 and 12 arranged on a traveling trajectory of the ion beam; a high-voltage tube 21 connected between the pair of acceleration tubes 11 and 12; a positive-side DC power supply 50 that applies a positive potential to the high-voltage tube 21 via a positive-side switch 52; a negative-side DC power supply 51 that applies a negative potential to the high-voltage tube 21 via a negative-side switch 53; and a pulse generation circuit 54 that controls, in a pulsed manner, on/off of the positive-side switch 52 and the negative-side switch 53 so that after being accelerated by the high-voltage tube 21 at a negative potential, the ion beam is re-accelerated through conversion of the potential of the high-voltage tube 21 from negative to positive.</p> |
