发明名称 Magnetic force sensor including a magneto-electric transducer
摘要 The present invention provides a magnetic force sensor that can precisely detect and correct variations in a magnetic field generated by a magnetic flux generating source. Therefore, a displacement magneto-electric transducer, which detects a change in the magnetic field caused by an external force, and a fixed magneto-electric transducer, where the change in the magnetic field caused by the external force does not occur, are provided to face end sides of magnetic poles of the magnetic flux generating source. The fixed magneto-electric transducer detects a variation of the magnetic field caused by, for example, changes with time and environmental variations such as a temperature rise in the interior of the sensor. On the basis of a detection amount thereof, an operational section performs a correction operation, so that a sensitivity coefficient or an offset of the displacement magneto-electric transducer is corrected.
申请公布号 US8978488(B2) 申请公布日期 2015.03.17
申请号 US201013509218 申请日期 2010.11.11
申请人 Canon Kabushiki Kiasha 发明人 Sato Shuuichi
分类号 G01L1/12;G01L1/22;G01L1/14;G01L5/00 主分类号 G01L1/12
代理机构 Canon USA Inc IP Division 代理人 Canon USA Inc IP Division
主权项 1. A magnetic force sensor that detects a force on the basis of a position of an action portion and a position of a magnetic flux generating source relative to each other, the action portion being displaceable by the force that the action portion receives, the magnetic force sensor comprising: the action portion resiliently supported by a supporting member; a first magneto-electric transducer fixed to the action portion; the magnetic flux generating source disposed so as to face the first magneto-electric transducer, a position of the magnetic flux generating source being fixed relative to the supporting member; a second magneto-electric transducer disposed at a fixed position with respect to the magnetic flux generating source; and an operational processing section that corrects an output of the first magneto-electric transducer on the basis of an output of the second magneto-electric transducer.
地址 Tokyo JP