Fluid control device

摘要

Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, and coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

主权项

1. A fluid control device wherein a plurality of lines each comprise:
a plurality of fluid controllers arranged at an upper level, a plurality of block coupling members arranged at a lower level, a plurality of external member connecting couplings arranged at the lower level, the plurality of lines being arranged in parallel on a base member having at least one orthogonal rail extending in a direction orthogonal to the plurality of lines, the plurality of lines having inlets directed in the same direction, with outlets thereof facing toward the same direction, wherein the inlets and outlets correspond to the external member connecting couplings, the fluid control device being characterized in that the base member is provided with a plurality of tracks arranged in parallel and corresponding to the respective lines, wherein the plurality of tracks includes at least a first track, the plurality of tracks being mounted on the at least one orthogonal rail, each track being slidable along the at least one orthogonal rail relative to other of said tracks in a direction orthogonal to the lines after the tracks are mounted on the at least one orthogonal rail, the block coupling members and external member connecting couplings being slidably mounted directly on the corresponding track, at least one of the fluid controllers being mounted on two of the block coupling members, at least one of the fluid controllers being mounted on one of the block coupling members and one of the external member connecting couplings, wherein slide members corresponding to the respective block coupling members are provided on the track, each of the slide members being connected to the corresponding block coupling member, each of the slide members including a first half segment and a second half segment, each of the half segments having an upper surface forming a stepped portion with a lower portion at an outer side, two of the block coupling members are not directly connected to each other so that each block coupling member can be fixed at any position of the track independently, and each block coupling member has vertical internally threaded portions formed in the upper wall, and each block coupling member has a V-shaped or U-shaped channel, the at least one fluid controller mounted on two of the block coupling members is attached by driving screws inserted through the at least one fluid controller mounted on two of the block coupling members into the internally threaded portions of the block coupling members, wherein each one of the tracks comprises two shape members each having a groove and being arranged side by side, each of the shape members forms the groove between two inward flanges, the groove has a downwardly tapered trapezoidal cross section, and a slide member having a downwardly tapered trapezoidal cross section and a vertical internally threaded portion is provided in the track and is connected to one of the coupling members by a screw member.