| 发明名称 |
LAMP CROSS-SECTION FOR REDUCED COIL HEATING |
| 摘要 |
Embodiments of apparatus for providing radiant energy in the form of electromagnetic radiation are provided herein. In some embodiments a radiation source for electromagnetic radiation includes a tubular body formed from a material transparent to electromagnetic radiation; a filament disposed within the tubular body; and a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to minimize reflection of electromagnetic radiation emanating from the filament during use back to the filament. |
| 申请公布号 |
US2015063792(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201414477460 |
申请日期 |
2014.09.04 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
Ranish Joseph M. |
| 分类号 |
H01K1/32;H01L21/67 |
主分类号 |
H01K1/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A radiation source for electromagnetic radiation in a substrate processing system, comprising:
a tubular body formed from a material transparent to electromagnetic radiation; a filament disposed within the tubular body; and a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to minimize reflection of electromagnetic radiation emanating from the filament during use back to the filament. |
| 地址 |
Santa Clara CA US |
