| 发明名称 |
MEMS COMPONENT |
| 摘要 |
A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection. |
| 申请公布号 |
US2015059482(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201314012804 |
申请日期 |
2013.08.28 |
| 申请人 |
ZOELLIN Jochen;EHRENPFORDT Ricardo;GRAF Juergen;SCHELLING Christoph;ANTE Frederik;CURCIC Michael |
发明人 |
ZOELLIN Jochen;EHRENPFORDT Ricardo;GRAF Juergen;SCHELLING Christoph;ANTE Frederik;CURCIC Michael |
| 分类号 |
B06B1/18 |
主分类号 |
B06B1/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS component, comprising:
a pressure-sensitive diaphragm element, which spans a pressure connection opening at least partially, and a resonant vibrator device, having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode, wherein the vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in a case of a diaphragm deflection. |
| 地址 |
Muellheim DE |
