VERTICAL PROBE CARD FOR MICRO-BUMP PROBING

摘要

The present invention relates to a probe card, and more particularly a probe card that can provide fine pitch for micro-bump probing, can be manufactured at a low cost for a short time through a simple manufacturing process, and can have excellent electric characteristics because it can have the components and a thin film resistance therein.

主权项

1. A probe card comprising:
a printed circuit board; a space transformer substrate that has a first side facing the printed circuit board and a second side opposite to the first side, has first circuit patterns on the second side, and has conductive signal transmitting portions that are filled in a plurality of through-holes formed through the first side and the second side and are connected with the first circuit pattern; a plurality of connectors that connect the printed circuit board with the signal transmitting portions of the space transformer substrate; and probe tips that have one end that can be brought in contact with an object to be tested and the other end that is connected to the first circuit patterns of the space transformer substrate.