THIN FILM DEPOSITING APPARATUS AND THE THIN FILM DEPOSITING METHOD USING THE SAME

摘要

Disclosed are a thin film depositing apparatus and a thin film depositing method using the same. The thin film depositing apparatus comprises: a mask adhering to the first surface of a base plate; a magnet plate to draw the mask from the second surface of the base plate, opposed to the first surface towards the first surface; and an insulation member interposed between the magnet plate and the second surface of the base plate. Therefore, a local defect on a thick film due to a thermal gradient during a deposition process can effectively be prevented.