Thermal Substitution Power Measurement System with RF Self-Heating Temperature Sensor

摘要

A thermal substitution power measurement system includes an electromechanically-resonant temperature sensor, a temperature measurement circuit coupled to the temperature sensor, an RF power source, and a power controller. The temperature sensor has a temperature-dependent resonance at a first frequency. The temperature measurement circuit generates a temperature signal dependent on the first frequency. The RF power source delivers to the temperature sensor a controllable level of RF power at a second frequency corresponding to a resonance of the temperature sensor and outputs a measure of the RF power delivered to the temperature sensor. The power controller operates in response to the temperature signal to control the RF power delivered to the temperature sensor to maintain the temperature signal constant notwithstanding variations in external power input to the temperature sensor.

主权项

1. A thermal substitution power measurement system, comprising:
an electromechanically-resonant temperature sensor having a resonance at a first frequency, the first frequency varying in response to changes in temperature of the temperature sensor; a temperature measurement circuit to generate a temperature signal dependent on the first frequency, the temperature measurement circuit coupled to the temperature sensor; a variable RF power source to deliver to the temperature sensor a controlled level of RF power at a second frequency corresponding to a resonance of the temperature sensor, and additionally to output a measure of the RF power output by the variable RF power source; and a power controller, operating in response to the temperature signal, to control the level of the RF power delivered to the temperature sensor by the variable RF power source, to maintain the temperature signal constant notwithstanding variations in external heat input to the temperature sensor.