发明名称 反应室观测窗及使用其之反应室;OBSERVATION WINDOW AND CHAMBER USING THE SAME
摘要 一种反应室观测窗,供装设于反应室腔体侧壁上,包含遮板与透明板。遮板连接于反应室腔体侧壁并具有第一观测口及一外侧面;透明板设置于该外侧面之一侧,并自该外侧面覆盖第一观测口。透明板上并定义至少一第一观测区与一第二观测区,该第一观测区与该第二观测区至少部分不重叠。透明板相对于遮板定义至少一第一观测位置及一第二观测位置;当透明板位于第一观测位置时,其第一观测区覆盖第一观测口,当透明板位于第二观测位置时,其第二观测区覆盖第一观测口。; the transparent plate is disposed at a side of the outer surface and cover the first observation hole from the outer surface. At least one first observation area and at least one second observation area is defined on the transparent plate, wherein the first observation area has at least a portion not overlapping with the second observation area. The transparent plate is defined to be located at first observation position and a second observation position relative to the shutter. When the transparent plate is at the first observation position, the first observation area covers the first observation hole; when the transparent plate is at the second observation position, the second observation area covers the first observation hole.
申请公布号 TW201506988 申请公布日期 2015.02.16
申请号 TW102129050 申请日期 2013.08.13
申请人 友达光电股份有限公司 发明人 江淋梁
分类号 H01L21/00(2006.01) 主分类号 H01L21/00(2006.01)
代理机构 代理人 李贞仪
主权项
地址 新竹市新竹科学工业园区力行二路1号