| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element, provided with a comb-like electrode on a piezoelectric substrate, having excellent temperature characteristics.SOLUTION: On a crystal substrate 10 that is so cut that a surface acoustic wave (SAW) is propagated on a surface whose Euler angle is (0°, 17°to 22°, 0°), a resonator 1 equipped with an IDT electrode 2 and a reflector 3 is disposed. On a front side on which the resonator 1 at the crystal substrate 10 is formed, a silicon oxide film is formed. One example of a specific formation position of a compensation film 20 is a space area 15 between mutually neighboring electrode fingers 6, 6 at the IDT electrode 2. |
