发明名称 |
METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SURFACE OF A MELT |
摘要 |
A method of horizontal ribbon growth from a melt of material includes forming a leading edge of the ribbon using radiative cooling, drawing the ribbon in a first direction along a surface of the melt, removing heat radiated from the melt in a region adjacent the leading edge of the ribbon by setting a temperature Tc of a cold plate proximate a surface of the melt at a value that is greater than 50° C. below a melting temperature Tm of the material, setting a temperature at a bottom of the melt at a value that is between 1° C. and 3° C. greater than the Tm, and providing the heat flow through the melt at a heat flow rate that is above that of an instability regime characterized by segregation of solutes during crystallization of the melt, and is below a heat flow rate for stable isotropic crystal growth. |
申请公布号 |
US2015040818(A1) |
申请公布日期 |
2015.02.12 |
申请号 |
US201414526008 |
申请日期 |
2014.10.28 |
申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Kellerman Peter L.;Sun Dawei;Mackintosh Brian H. |
分类号 |
C30B15/14;C30B29/06;C30B15/06 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
1. A method of horizontal ribbon growth from a melt of material, comprising:
forming a leading edge of the ribbon using radiative cooling on a surface of the melt; drawing the ribbon in a first direction along the surface of the melt; removing heat radiated from the melt in a region adjacent the leading edge of the ribbon by setting a temperature Tc of a cold plate proximate a surface of the melt at a value that is greater than 50° C. below a melting temperature Tm of the material; setting a temperature at a bottom of the melt at a value that is between 1° C. and 3° C. greater than the Tm; and providing the heat flow through the melt at a heat flow rate that is above that of an instability regime characterized by segregation of solutes during crystallization of the melt, and is below a heat flow rate for stable isotropic crystal growth. |
地址 |
Gloucester MA US |