发明名称 圧電アクチュエータの曲げ振動制御方法
摘要 <p>In the method for monitoring flexural vibrations of a piezoactuator, a small-signal spectrum of a piezoactuator, which is provided and mounted for the purpose of exciting longitudinal vibrations, is measured and an excitation of a transverse vibration in the piezoactuator is detected from resonances occurring in the small-signal spectrum.</p>
申请公布号 JP5663090(B2) 申请公布日期 2015.02.04
申请号 JP20130523645 申请日期 2011.09.02
申请人 发明人
分类号 H01L41/09;H01L41/253 主分类号 H01L41/09
代理机构 代理人
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