Hybrid design rule for double patterning

摘要

Among other things, one or more systems and techniques for generating or implementing a hybrid design rule set are provide herein. A set of color design rules and a set of color agnostic design rules are generated and exposed for selective design rule assignment. In an embodiment, a first color design rule is assigned to a first polygon. In an embodiment, a first color agnostic design rule is assigned to a second polygon. In this way, color design rules and color agnostic design rules are selectively applied to polygons of a design layout. Color design rules are selected for space and design efficiency. Color agnostic rules are selected for conservative design layout for design ease. A design rule checking stage and a design rule fixing stage are performed such that the design layout is compliant after color decomposition without a second design rule fixing stage.

主权项

1. A system for hybrid design rule generation, comprising:
a color component configured to:
define a set of color design rules for design layout compliance of a design layout for an integrated circuit, the set of color design rules applicable to one or more colored polygons within the design layout; a color agnostic component configured to:
define a set of color agnostic design rules for design layout compliance of the design layout, the set of color agnostic design rules applicable to one or more non-colored polygons within the design layout; and a design checker component configured to:
determine whether a first polygon of the design layout is colored;apply a first color design rule of the set of color design rules to the first polygon when the first polygon is colored; andapply a first color agnostic design rule of the set of color agnostic design rules to the first polygon when the first polygon is not colored.