| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inspection method and inspection device of an inspection object capable of accurately inspecting it in a short time.SOLUTION: An inspection device 1b includes: gas supplying means 2, a chamber 3a, a storage unit 4 for detection gas, and optical detecting means 5b. When a fluid leaks from a defective part of an inspection object 10 into a space in a chamber 3a, gas 13 in the chamber 3a flows into the storage unit 4 for detection gas in accordance with the volume of the leaking fluid 12, gas 14 for detection is pressed out of the storage unit 4 for detection gas in accordance with the volume of the flowing gas 13, and the optical detecting means 5b detects the pressed gas 14 for detection.</p> |
