| 摘要 |
The purpose of the present invention is to more quickly and easily measure the shape of an object to be measured. A shape measurement device has: a probe including a projection optical system that either projects a line-shaped pattern towards the surface of the object to be measured or projects a spot pattern inside at least a line-shaped scanning range, while scanning, and an imaging device that detects a pattern image projected on the object to be measured; a travel mechanism that relatively rotates the object to be measured and the probe such that the object to be measured rotates relative to the probe around the axis of rotation and causes at least either the probe or the object to be measured to relatively move in a direction intersecting the rotation direction in which the object to be measured rotates; a measurement region setting unit that sets a measurement region for the object to be measured; and an actual measurement region setting unit that sets an actual measurement region including an actual measurement start position and an actual measurement end position, on the basis of the measurement region set by the measurement region setting unit. The actual measurement region setting unit sets either the actual measurement start position or the actual measurement end position, whichever is closer to the rotation axis center, such that same is closer to the rotation axis than the measurement region, and sets either the actual measurement start position or the actual measurement end position, whichever is positioned on the outside in the radial direction, to be further away from the rotation axis than the measurement range. |
