PRODUCTION OF GRATING WAVEGUIDE

摘要

PURPOSE:To provide the process for production of a grating waveguide which solves the problems of the cavities in fine grooves and deformation of the fine grooves generated at the time of embedding the fine grooves possessed by the grating waveguide. CONSTITUTION:A stage for forming the fine grooves 7 in a core part after forming a core layer 6 and embedding the grooves 7 of the core part after the formation of the core part having the grooves and before the formation of a second layer 8 is added to the process for production of the optical waveguide by forming a first clad layer 5 on a substrate 4, forming the core layer 6 on the first clad layer 5, removing the unnecessary part of the core layer 6 to form a core part on the surface of the first clad layer 5 and forming a second clad layer 8 so as to cover the core part together with the first clad layer 5.