摘要 |
本发明包括:第1检查程序A,在上游侧步骤中,基于自10片以上的一批次的多面采取玻璃基板1中抽取10片以上进行检查所得的缺陷资料,算出批次平均缺陷密度;估算程序B,改变存在缺陷4的假想单面2的个数来多次估算给上游侧步骤的处理者带来的利益与对下游侧步骤的处理者造成的损失,基于该些估算结果,算出利益超过损失时的存在缺陷4的假想单面2的容许面数;第2检查程序C,对一批次的所有多面采取玻璃基板进行检查,对存在缺陷的假想单面的个数进行计数;以及良否判定程序D,判定多面采取玻璃基板1的良否。; an estimation means B, estimating a profit brought to a handler in the upstream step and a loss brought to another handler in a downstream step by varying the number of virtual single-sided surfaces 2 having defects 4, and based on these estimation results, calculating an allowable number of the virtual single-sided surfaces 2 having defects 4 when the profit exceeds the loss; a second examination means C, performing examination on all of multi-surface-adopted glass substrates in a lot, and counting the number of the virtual single-sided surface having defects; and a pass/fail determination means, determining the pass or fail of the multi-surface-adopted glass substrates 1. |