Methods of fabricating large-area graphene

摘要

A method for fabricating large-area, high-quality Graphene product. Specifically, the fabrication method uses a seed layer of exfoliated Graphene in combination with a substrate and a catalyst metal layer and introduces Carbon atoms to the Graphene seed, causing growth of high-quality Graphene product. The method of the invention combines some steps of current mechanical exfoliation techniques with other steps of the CVD process and adds a new technique to the fabrication method involving seed-based catalyst of large-area Graphene product growth.

主权项

1. A method of fabricating Graphene, the method comprising:
providing a base layer comprising a substrate; depositing a Graphene seed layer on said substrate prior to introduction of Carbon atoms; depositing a catalyst metal layer on said substrate and said Graphene seed layer; and introducing Carbon atoms to said Graphene seed layer.