发明名称 METHOD FOR MANUFACTURING ORGANIC SEMICONDUCTOR FILM, ORGANIC SEMICONDUCTOR FILM, THIN FILM TRANSISTOR, ACTIVE MATRIX DEVICE, ELECTRO-OPTIC DEVICE AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a production method of an organic semiconductor film, by which an organic semiconductor film comprising an organic material in a suitable crystal state can be efficiently produced. ! SOLUTION: The production method of an organic semiconductor film includes: a solution imparting step of imparting a solution prepared by dissolving an organic semiconductor material in a solvent onto a substrate in a predetermined pattern; and a crystallization step of crystallizing the organic semiconductor material by volatilizing the solvent. The pattern has a specific area in a part thereof where volatilization of the solvent and crystallization of the organic semiconductor material preferentially proceed compared to other portions. ! COPYRIGHT: (C)2015,JPO&INPIT
申请公布号 JP2015005618(A) 申请公布日期 2015.01.08
申请号 JP20130129986 申请日期 2013.06.20
申请人 SEIKO EPSON CORP 发明人 MORIYA SOICHI
分类号 H01L29/786;G02F1/167;G09F9/30;H01L21/336;H01L51/05;H01L51/30 主分类号 H01L29/786
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