| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminate in which the laminate having fine surface unevenness reduced can be stably obtained. ! SOLUTION: A method of manufacturing a laminate includes two processes (1) and (2). In the process (1), a metal substrate 103 is prepared which has a cap layer 101 provided on at least one surface 110. In the process (2), an inorganic layer 109 is finally formed over the one entire surface 110 of the metal substrate 103 by growing an inorganic material 107 in order with a raw material gas from an exposed opening part 105 of the metal substrate 103 in a chemical vapor deposition method while exposing the one surface 110 of the metal substrate 103 by etching the cap layer 101 provided on the one surface 110 of the metal substrate 103 by supplying a mixed gas including an etching gas and the raw material gas to the cap layer 101. ! COPYRIGHT: (C)2015,JPO&INPIT |
