发明名称 WIRE MONITORING SYSTEM FOR WIRE SAW AND METHOD FOR MONITORING WIRE SAW
摘要 <p>PROBLEM TO BE SOLVED: To provide a wire monitoring system for a wire saw, the wire saw, and a method for monitoring a wire of the wire saw.SOLUTION: A wire monitoring system 10 for a wire saw 100 includes: a sensor device 50; a first wire positioning system 21 which moves a first wire from a first position of the first wire to a second position of the first wire; and a first wire holding arrangement 41 which is formed so as to hold the first wire at the second position to measure physical characteristics of the first wire by using the sensor device 50.</p>
申请公布号 JP2015003383(A) 申请公布日期 2015.01.08
申请号 JP20140127032 申请日期 2014.06.20
申请人 APPLIED MATERIALS SWITZERLAND SA 发明人 CLAUDE ZOMINY;SCHMID ANDREAS
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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